MEMSMap - Microstructure Vibration Analyzer

Overview

MEMSMap is a full‑field interferometric vibration analyzer designed specifically for vibration measurement of MEMS devices and micro‑mechanical structures. It captures complete mode shapes across the entire device surface in real time, with sub‑micron spatial resolution and high‑frequency capability extending into the MHz range.

Engineers and researchers use MEMSMap to characterize resonators, micro‑mirrors, sensors, actuators, and other microstructures where dynamic behavior is critical to performance and reliability.

Key Features

  • Full‑field vibration measurement — all points measured simultaneously
  • High‑frequency capability — suitable for MEMS resonators and RF devices
  • Sub‑micron spatial resolution — pixel‑level detail
  • Non‑contact, non‑destructive — no mass loading
  • Real‑time mode shape visualization
  • Sensitive to small stiffness or mass variations
  • Ideal for packaged or partially encapsulated devices

Measurement Principle

MEMSMap uses interferometric imaging to measure out‑of‑plane vibration across the entire microstructure.

  1. A coherent laser illuminates the device.
  2. Reflected light interferes with a reference beam.
  3. A high‑resolution camera captures the interference pattern.
  4. Phase extraction algorithms compute displacement for each pixel.
  5. Mode shapes and frequency responses are reconstructed in real time.

 

 

Why this matters

MEMS devices often have:

  • Complex geometries
  • High‑frequency resonances
  • Extremely small amplitudes
  • Sensitivity to packaging stress

MEMSMap captures these dynamics directly, without scanning or contact.

Applications

MEMS Resonators

  • Frequency characterization
  • Mode shape validation
  • Quality factor analysis

Optical MEMS / Micro‑Mirrors

  • Tilt dynamics
  • Torsional modes
  • Actuator performance

Sensors & Actuators

  • Accelerometers
  • Gyroscopes
  • Pressure sensors

RF MEMS

  • High‑frequency switching elements
  • Micro‑inductors and capacitors

Micro‑Mechanical Structures

  • Cantilevers
  • Bridges
  • Plates
  • Phononic structures

Measurement Workflow

  1. Mount the MEMS device under the optical system
  2. Illuminate with coherent laser
  3. Adjust focus and reference beam
  4. Apply electrical or mechanical excitation
  5. Acquire interferometric images
  6. Extract phase and compute vibration data
  7. Visualize mode shapes and frequency response
  8. Export results for simulation or reporting

The workflow is deterministic, repeatable, and optimized for micro‑scale analysis.

Example Outputs

High‑Frequency Mode Shapes

Visualization of resonances in the kHz–MHz range.

Amplitude Maps

Pixel‑level displacement fields across the device.

Frequency Response Functions

Identify resonances, anti‑resonances, and damping.

Packaging Effects

Measure how encapsulation shifts dynamic behavior.

Technical Specifications

Parameter

Specification

Measurement type

Full‑field interferometric vibrometry

Frequency range

DC to 240 MHz 

Spatial resolution

Sub‑micron (camera‑limited)

Displacement sensitivity

Nanometer to sub‑nanometer

Illumination

Coherent laser source

Device types

MEMS, micro‑mirrors, resonators, micro‑structures

Acquisition mode

Real‑time, full‑field

Output data

Mode shapes, displacement, velocity, frequency response

Why Choose MEMSMap

Why Choose MEMSMap

  • Purpose‑built for MEMS and microstructures
  • High‑frequency performance unmatched by scanning methods
  • Full‑field measurement reveals complex mode shapes
  • Non‑contact — no mass loading or probe interference
  • High spatial resolution for micro‑scale geometries
  • Real‑time visualization accelerates R&D and QA

MEMSMap is the ideal tool for engineers who need accurate, high‑resolution dynamic data at micro‑scale.

📞 Contact Optonor

For demonstrations, technical discussions, or application support, our team is ready to help.

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